NovaMARS 5.0 is geared towards addressing the industry’s transition to novel chip design concepts such as 3D gates, recently introduced as part of the transition to sub-3x technology nodes, in both memory and logic.  NovaMARS 5.0 is optimized for speed of recipe development, ease of use, and accuracy of solution for the most complex 3D scatterometry applications for the 2x and 1x technology nodes.

Enables development of scatterometry applications
NovaMARS 5.0 scatterometry engine has the ability to combine data from multiple optical channels directly on the tool during measurement. This multi-channel capability complements existing Holistic Metrology elements, which are part of Nova’s product offering, such as injection, multi-stack, and global fit. Together, these elements provide the most comprehensive algorithmic solution to date for the development of scatterometry applications. More detailed reproduction of complex 3D structures is now possible by extraction of fine shape parameters, enabling process control of advanced devices like FinFET non-planar transistors.

Reduced Time to Solution
Algorithmic advancements on NovaMARS 5.0 provide significant reduction in time to solution.

Ease of Use
Included is a new NovaMARS StackMaker™ designer for scatterometry models that allows simple drag-and-drop design and visualization of very complex 3D device geometries, making it easy for users to track and implement design and process changes into existing models, as well as create new models. The industry-leading NovaMARS MatMaker™ materials characterization package, already implemented in previous NovaMARS versions, receives an order-of-magnitude faster regression engine allowing for fast convergence to the correct materials and correct solution. Multiple enhancements to spectral matching routines complete the package.

NovaMARS 5.0 is compatible with existing NovaScan and T-platform scatterometry tools, and is a critical enabler for the new Nova T600 measurement tool.